Abstract
A calibration technique determines an optimal value of substrate vacuum that
allows as swift movement of the substrate as possible while still maintaining sufficient
control of substrate position to ensure accuracy of swath advance.
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Recommended Citation
INC, HP, "CALIBRATION OF OPT SENSOR THROUGH VACUUM FOR SUBSTRATE REGISTRATION IN ORDER TO APPLY DYNAMIC SWATH ADVANCE", Technical Disclosure Commons, (September 11, 2020)
https://www.tdcommons.org/dpubs_series/3594
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