Abstract
Digital microfluidics represents a rapidly advancing domain offering precise control over small fluid volumes, spanning from microliters down to picoliters. Recognizing the limitations of conventional fragile substrates such as glass or silicon in extreme operational environments, this study introduces AlTiC substrates as a robust and effective alternative. In this work, we systematically detail the fabrication methodology for digital microfluidic devices utilizing AlTiC substrates, outlining the key processes needed to achieve reliable device functionality, thereby demonstrating fabrication of durable devices, and the specific fabrication nuances discussed may support further advancements in this technology.
Creative Commons License
This work is licensed under a Creative Commons Attribution 4.0 License.
Recommended Citation
Walz, Randi; Gan, Christine; Mirkale, Kshitija; Namboori, Akhil; Moore, Angela; Li, Jing; and Mooney, Marcus, "Fabrication of EWOD Devices on AlTiC substrate", Technical Disclosure Commons, (May 20, 2026)
https://www.tdcommons.org/dpubs_series/10192