Abstract
This publication describes a technology for the treatment of fluorinated greenhouse gas, sulfur hexafluoride, and nitrous oxide emissions. A plasma jet, which can be accompanied by a carrier gas, is directed into a low-pressure environment. The chamber includes a porous catalyst bed and a pressure differential is utilized behind the bed to control the dispersion of the plasma. Light is introduced near the plasma jet to illuminate the catalyst. This arrangement allows for plasma-based activation and species breakdown, while the degradation products are processed by the photocatalyst.
Keywords: plasma jet, fluorinated greenhouse gas, abatement, photocatalyst, pressure differential, bias, semiconductor manufacturing.
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Recommended Citation
N/A, "Plasma Jet Curtain", Technical Disclosure Commons, ()
https://www.tdcommons.org/dpubs_series/10049