A scratch resistant, antireflection coating can include a plurality of layers of alternating high and low refractive index materials. In some cases, a ratio of the total thickness of the high refractive index materials to the total thickness of the low refractive index materials can be greater than 3.0, and the nano hardness of the antireflection coating is greater than 15 GPa. In some cases, hard materials can be used for both the high and low refractive index material layers, and the nano hardness of the antireflection coating is greater than 15 GPa.
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Chen, Brad and Peng, Alvin, "SCRATCH-RESISTANT ANTIREFLECTION COATING", Technical Disclosure Commons, (March 26, 2021)